Optical Microsensors for Fluid Flow Diagnostics
نویسندگان
چکیده
Copyright© 2001 by Gharib, Modarress, Fourguette, and Wilson. Published by the American Institute of Aeronautics and Astronautics, Inc., with permission. Abstract This manuscript describes two MEMS based optical sensors for wall shear stress and velocity measurements in flow fields. Experimental results obtained with the wall shear stress sensor, the MicroS3, are compared with boundary layer velocity measurements obtained with a traversing laser Doppler anemometer. Preliminary velocity measurements conducted with the time-offlight Micro Velocimeter, the MicroV, in a microchannel indicate that these microsensors offer a wide range of opportunities for the implementation of chip function monitoring and feedback control loops on microfluidics chips. Future sensor designs are described.
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